执行标准:GB/T 30901-2014
项目 |
指标 |
||
UP级 |
UP-S级 |
||
氟化铵含量 w/% ≤ |
40.0±1.0 |
40.0±1.0 |
|
色度/Hazen ≤ |
10 |
10 |
|
PH(10g/L溶液,25℃ ≤ |
6.0-7.5 |
6.0-7.5 |
|
氯化物(以Cl计) w/(mg/kg) ≤ |
5 |
3 |
|
硝酸盐(以NO3计) w/(mg/kg) ≤ |
5 |
3 |
|
磷酸盐(以PO4计) w/(mg/kg) ≤ |
5 |
1 |
|
硫酸盐(以SO4计) w/(mg/kg) ≤ |
5 |
3 |
|
铝(Al)w/(μg/kg) ≤ |
5 |
1 |
|
砷(As)w/(μg/kg) ≤ |
5 |
1 |
|
硼(B)w/(μg/kg) ≤ |
5 |
1 |
|
钡(Ba)w/(μg/kg) ≤ |
5 |
1 |
|
钙(Ca)w/(μg/kg) ≤ |
5 |
1 |
|
镉(Cd)w/(μg/kg) ≤ |
5 |
1 |
|
铬(Cr)w/(μg/kg) ≤ |
5 |
1 |
|
铜(Cu)w/(μg/kg) ≤ |
5 |
1 |
|
铁(Fe)w/(μg/kg) ≤ |
5 |
1 |
|
钾(K)w/(μg/kg) ≤ |
5 |
1 |
|
锂(Li)w/(μg/kg) ≤ |
5 |
1 |
|
镁(Mg)w/(μg/kg) ≤ |
5 |
1 |
|
锰(Mn)w/(μg/kg) ≤ |
5 |
1 |
|
钠(Na)w/(μg/kg) ≤ |
5 |
1 |
|
镍(Ni)w/(μg/kg) ≤ |
5 |
1 |
|
铅(Pb)w/(μg/kg) ≤ |
5 |
1 |
|
钛(Ti)w/(μg/kg) ≤ |
5 |
1 |
|
锑(Sb)w/(μg/kg) ≤ |
5 |
1 |
|
锡(Sn)w/(μg/kg) ≤ |
5 |
1 |
|
锌(Zn)w/(μg/kg) ≤ |
5 |
1 |
|
颗粒 |
(≥0.5μm)/(个/mL) ≤ |
- |
10 |
(≥0.2μm)/(个/mL) ≤ |
- |
- |
用途:该产品主要应用于集成电路和超大规模集成电路芯片的清洗、蚀刻等行业 。